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Dry Etching For Very Large Scale Integration

RRP $634.99

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This book has been written as part of a series of scientific books being published by Plenum Press. The scope of the series is to review a chosen topic in each volume. To supplement this information, the abstracts to the most important references cited in the text are reprinted, thus allowing the reader to find in-depth material without having to refer to many additional publications. This volume is dedicated to the field of dry (plasma) etching, as applied in silicon semiconductor processing. Although a number of books have appeared dealing with this area of physics and chemistry, these all deal with parts of the field. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI. Examples are given throughout the fundamental sections, in order to give the reader a better insight in the meaning and magnitude of the many parameters relevant to dry etching. Electrical engineering concepts are emphasized to explain the pros and cons of reactor concepts and excitation frequency ranges. In the description of practical applications, extensive use is made of cross-referencing between processes and materials, as well as theory and practice. It is thus intended to provide a total model for understanding dry etching. The book has been written such that no previous knowledge of the subject is required. It is intended as a review of all aspects of dry etching for silicon semiconductor processing.


Emerald Fairways And Foam-flecked Seas

RRP $29.99

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Every golfer dreams of making a pilgrimage to Ireland to enjoy the 'craic' and play some memorable golf on some of the most magnificent courses in the world.

From the opening drive at Lahinch, to the spectacular dune-framed holes ay Ballybunion, Ireland boasts an extraordinary collection of seaside links. Royal County Down, Royal Portrush, Portmarnock, Portstewart, Waterville and the Island, the European Club and Baltry-any of these would be reason to cross an ocean, and the concentration of all of them on such a small land mass makes for a golfer's paradise limited only by time and budget. For the tourist or the dreamer, there can be no better guide than James W. Finegan.

A passionate advocate and a charming storyteller, Finegan combines a writer's eye, a historian's knowledge, and a golfer's sense of wonder and apprehension to provide an impossibly ambitious grand tour of this beautiful land. In a loop that begins in the West at Lahinch and continues clockwise through both the Republic and Northern Ireland, Finegan covers more than fifty courses, visiting those that have become true shrines of the game, the courses that are well known and respected, and the little-known gems you might otherwise pass right by.

He shares the history of the courses, and writes marvelously what's to be found as you play them yourself. And he provides all the information you need to make your arrangements, both on and off the course.



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